1.

Conference Proceedings
Conference Proceedings
1. Studies on immersion defects using mimic immersion experiments [6153-61]
Hanawa, T ; Suganaga, T ; Ishibashi, T ; Maejima, S ; Narimatsu, K ; Suko, K ; Terai, M ; Kumada, T ; Kitano, J
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61531O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
2.

Conference Proceedings
Conference Proceedings
2. Newly developed RELACS materials and processes for the 65 nm node and beyond [6153-92]
Terai, M ; Kumada, T. ; Ishibashi, T. ; Hanawa, T. ; Satake, N. ; Takano, Y.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61532I-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153