1.

Conference Proceedings
Conference Proceedings
1. Lattice strain in excimer-laser-crystallized poly-Si thin films
Okumura,H. ; Tanikawa,A. ; Sera,K. ; Okumura,F.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California.  pp.320-327,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3618
2.

Conference Proceedings
Conference Proceedings
2. Relation between Minute Lattice Strain and Anonmalous Oxygen Precipitation in a Czochralski-Grown Silicon Crystal
Kimura,S. ; Ikarashi,T. ; Tanikawa,A. ; Ishikawa,T.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1743-1748,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201