1.

Conference Proceedings
Conference Proceedings
1. Haze prevention and phase/transmission preservation through cleaning process optimization [5992-51]
Qin, J. ; Zhang, Y. ; Delgado, R. ; Rockwell, B. ; Tan, F. ; Phan, K. ; Berger, L. ; Liu, M. ; Dietez, U.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921E-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
2.

Conference Proceedings
Conference Proceedings
2. Photomask registration specification and its impact on FLASH memory devices [5992-57]
Carpi, E. ; Brwon, S. ; Tan, F. ; Edwards, R.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921K-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992