1.

Conference Proceedings
Conference Proceedings
1. Influence of Si Substrate Crystallinity of Device Performance
Iwamoto, T. ; Takano, J. ; Makihara, K. ; Ohmi, T.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.193-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
2.

Conference Proceedings
Conference Proceedings
2. CHEMICAL OXIDE PASSIVATION FOR VERY THIN OXIDE FORMATION
Takano, J. ; Makihara, K. ; Ohmi, T.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.381-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
3.

Conference Proceedings
Conference Proceedings
3. New Measurement Method of Adsorbed Moisture Concentration on Solid Surface
Nakagawa, Y. ; Aomi, H. ; Takano, J. ; Ohmi, T.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II.  pp.97-108,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-3
4.

Conference Proceedings
Conference Proceedings
4. COMPUTER SIMULATION OF SURFACE DIFFUSION OF COPPER ON COPPER (111) AND (100) SURFACES
Takano, J. ; Mochizuki, M. ; Doyama, Masao
Pub. info.: Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA.  pp.643-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 355