1.
Conference Proceedings
Saito,T. ; Mitsuhashi,K. ; Arai,M. ; Seki,K. ; Tada,A. ; Igarashi,T. ; Hotta,K.
Pub. info.:
Optical microlithography XII : 17-19 March 1999, Santa Clara, California . Part2 pp.1069-1075, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3679
2.
Conference Proceedings
Kakizaki,K. ; Saito,T. ; Mitsuhashi,K. ; Arai,M. ; Tada,A. ; Kasahara,S. ; Igarashi,T. ; Hotta,K.
Pub. info.:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA . Part2 pp.1397-1404, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
3.
Conference Proceedings
Yano,J. ; Ito,S. ; Sekita,H. ; Tada,A. ; Ogura,Y.
Pub. info.:
Optical Microlithography X . pp.899-906, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
4.
Conference Proceedings
Sekita,H. ; Yano,J. ; Tada,A. ; Tamegai,M. ; Yoshida,K. ; Kasamatsu,T. ; Ito,S. ; Saito,T. ; Ogura,Y.
Pub. info.:
Gas and Chemical Lasers and Applications II . pp.80-87, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2987
5.
Conference Proceedings
Watanabe,H. ; Kitatochi,N. ; Kakizaki,K. ; Tada,A. ; Sakuma,J. ; Ariga,T. ; Hotta,K.
Pub. info.:
Optical Microlithography XIV . 4346 pp.1074-1079, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
6.
Conference Proceedings
Kakizaki,K. ; Matsunaga,T. ; Sasaki,Y. ; Inoue,T. ; Tanaka,S. ; Tada,A. ; Taniguchi,H. ; Arai,M. ; Igarashi,T.
Pub. info.:
Optical Microlithography XIV . 4346 pp.1210-1218, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
7.
Conference Proceedings
Saito,T. ; Matsunaga,T. ; Mitsuhashi,K. ; Terashima,K. ; Ohta,T. ; Tada,A. ; Ishihara,T. ; Yoshino,M. ; Tsushima,H. ; Enami,T. ; Tomaru,H. ; Igarashi,T.
Pub. info.:
Optical Microlithography XIV . 4346 pp.1229-1237, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346