1.

Conference Proceedings
Conference Proceedings
1. Performance Impact of silicided Source/Drain/Gate on Deep Submicron CMOS Circuits
L.K. Wang ; W.H. Chang ; T. Lii
Pub. info.: Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials.  pp.268-274,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-25
2.

Conference Proceedings
Conference Proceedings
2. Characterization of bending CD errors induced by resist trimming in 65 nm node and beyond
Y. Gu ; J. B. Friedmann ; V. Ukraintsev ; G. Zhang ; T. Wolf ; T. Lii ; R. Jackson
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. Transition from precise to accurate critical dimension metrology
V. A. Ukraintsev ; M. C. Tsai ; T. Lii ; R. A. Jackson
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518