1.

Conference Proceedings
Conference Proceedings
1. Particle Removal from Si Substrates in Organic Solvents using Megasonic Energy
F. Barbagini ; T. Janssens ; T. Bearda ; S. Armini ; J. Van Hoeymissen
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.101-108,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
2.

Conference Proceedings
Conference Proceedings
2. Local Removal Frequency of Nano Particles in Megasonic Cleaning
T. Janssens ; K.L. Wostyn ; S. Arnauts ; A. De Geyter ; T. Bearda
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.353-360,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
3.

Conference Proceedings
Conference Proceedings
3. A New Approach for FEOL Critical Wafer Surface Cleaning
T. Fischer ; S. Puri ; R. Hoyer ; K.L. Wostyn ; T. Janssens
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.167-174,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
4.

Conference Proceedings
Conference Proceedings
4. Particle Removal from Micrometer-Sized Trenches Using High-Velocity-Aerosol Cleaning and Comparison with Megasonic Tank Cleaning
K.L. Wostyn ; K. Sano ; A. Eitoku ; T. Janssens ; T. Bearda
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.55-60,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
5.

Conference Proceedings
Conference Proceedings
5. Characterization of Ge Implanted with Ni and Hf Ions
S. Sioncke ; E.R. Simoen ; T. Janssens ; M.M. Meuris ; P.W. Mertens
Pub. info.: SiGe and Ge, materials, processing, and devices.  pp.1109-1119,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(7)
6.

Conference Proceedings
Conference Proceedings
6. Effective Workfunction Modulation by As Implantation in Metal Gate Stacks
R. Singanamalla ; H. Yu ; T. Janssens ; T. Witters ; T. Schram ; S. Kubicek ; S. DeGendt ; M. Jurczak ; K. De Meyer
Pub. info.: Dielectrics for nanosystems II: materials science, processing, reliability, and manufacturing.  pp.49-62,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(1)