1.

Conference Proceedings
Conference Proceedings
1. Advanced Annealing Schemes for High-Performance SOI Logic Technologies
T. Feudel
Pub. info.: Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany.  pp.387-402,  2008.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 573-574
2.

Conference Proceedings
Conference Proceedings
2. Reduced Parameter Fluctuation with Laser and Flash Lamp Anneal for 65nm Volume Production
T. Feudel ; B. Bayha ; G. Burbach ; M. Gerhardt ; L. Herrmann ; M. Herden ; T. Mantei ; E. Ehrichs ; M. Greenlaw ; M. Horstmann
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment.  pp.373-380,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(1)