1.

Conference Proceedings
Conference Proceedings
1. Etching mechanism of Au thin films in Cl2/Ar inductively coupled plasma
Efremov, A. ; Svettsov, V. ; Kim, C.-I.
Pub. info.: Micro- and Nanoelectronics 2003.  pp.72-78,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5401
2.

Conference Proceedings
Conference Proceedings
2. Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma
Efremov, A. ; Svettsov, V. ; Kim, C.-I.
Pub. info.: Micro- and Nanoelectronics 2003.  pp.64-71,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5401