1.

Conference Proceedings
Conference Proceedings
1. ELECTRICAL PROPERTIES OF TANTALUM BASED COMPOSITE OXIDE FILMS
Kattelus, Hannu ; Ylilammi, Markku ; Salmi, Jorma ; Ranta-Aho, Timo ; Nykanen, Erja ; Suni, Ilkka
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.511-516,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. A Novel CMP Process on Fixed Abrasive Pads for the Manufacturing of Highly Planar Thick Film SOI Substrates
Kulawski, Martin ; Henttinen, Kimmo ; Suni, Ilkka ; Weimar, Frauke ; Makinen, Jari
Pub. info.: Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.133-140,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 767
3.

Conference Proceedings
Conference Proceedings
3. Advances in the CMP Process on Fixed Abrasive Pads for the Polishing of SOI-Substrates With High Degree of Flatness
Kulawski, Martin ; Luoto, Hannu ; Henttinen, Kimmo ; Suni, Ilkka ; Weimar, Franke ; Makinen, Jari
Pub. info.: Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.191-196,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 816