1.

Conference Proceedings
Conference Proceedings
1. LOW TEMPERATURE SILICON OXIDATION WITH ELECTRON CYCLOTRON RESONANCE OXYGEN PLASMA
Sung, K. T. ; Pang, S. W.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.319-324,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
2.

Conference Proceedings
Conference Proceedings
2. RELATING PHOTORESIST ETCH CHARACTERISTICS TO LANGMUIR PROBE MEASUREMENTS IN AN ELECTRON CYCLOTRON RESONANCE SOURCE
Sung, K. T. ; Juan, W. H. ; Pang, S. W. ; Dahimene, M.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.305-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
3.

Conference Proceedings
Conference Proceedings
3. Electrical Characterization and Surface Analysis of Dry Etch Induced Damage on Si after Etching in an Electron Cyclotron Resonance Source
Sung, K. T. ; Pang, S. W. ; Cole, M.W. ; Pearce, N.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.132-143,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
4.

Conference Proceedings
Conference Proceedings
4. LOW TEMPERATURE SILICON OXIDATION WITH ELECTRON CYCLOTRON RESONANCE OXYGEN PLASMA
Sung, K. T. ; Pang, S. W.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.781-786,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235