1.

Conference Proceedings
Conference Proceedings
1. Aggregate Behavior in Metal CMP Slurries
Tamboli, D.C. ; Desai, V.H. ; Dogariu, A. ; Sundaram, K.B. ; Maury, A. ; Obeng, Y.
Pub. info.: Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing.  pp.206-217,  1998.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-7
2.

Conference Proceedings
Conference Proceedings
2. Studies on Cerium Dioxide as a Gate Oxide Material for MOS Transistors
Sundaram, K.B. ; Blanchard, J.A.
Pub. info.: Dielectric material integration for microelectronics.  pp.206-215,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-3
3.

Conference Proceedings
Conference Proceedings
3. Selectivity Studies on Tantalum Barrier Layer for Copper Chemical Mechanical Planarization
Vijayakumar, A. ; Du, T. ; Sundaram, K.B. ; Desai, V.
Pub. info.: Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium.  pp.164-173,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-13
4.

Conference Proceedings
Conference Proceedings
4. Photoluminescence Studies of Thermally Impurity Diffused Porous Silicon Layers
Sundaram, K.B. ; Ali, S.A. ; Peale, R.E. ; McClintic., W.A., Jr.
Pub. info.: Proceedings of the Symposium on Nanostructured Materials in Electrochemistry.  pp.15-26,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-8
5.

Conference Proceedings
Conference Proceedings
5. Fabrication of Metal Insulator Field Effect Tran-sistors Using Silcon Nitride and Silicon-Oxyni-tride as Gate Insulators
Sundaram, K.B. ; Seshan, S.S.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.143-152,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10
6.

Conference Proceedings
Conference Proceedings
6. Mechanisms of Copper Removal during Chemical Mechanical Polishing
flu, T ; Desai, V. ; Ta, D. ; Cliathapuram, nboli; V. ; Sundaram, K.B.
Pub. info.: Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium.  pp.235-245,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-22
7.

Conference Proceedings
Conference Proceedings
7. Deposition Parameter Studies Of Silicon Nitride Films Prepared By PECVD Process And Their Applications To Surface Acoustic Wave Devices
Sundaram, K.B. ; Lee, R. ; Malocha, D.C. ; Hines, J.H.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.198-207,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
8.

Conference Proceedings
Conference Proceedings
8. Wet Etching Studies on Electron Cyclotron Resonance (ECR) Plasma Enhanced Chemical Vapor Deposited Silicon Nitride Films
Sundaram, K.B. ; Sah, R.E. ; Balachandran, K.
Pub. info.: Plasma processing XIII : proceedings of the international symposium.  pp.34-41,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-6
9.

Conference Proceedings
Conference Proceedings
9. Fixed wavelength selection for the far-infrared p-Ge laser using patterned silicon etched mirrors
Bosq, T.W.D. ; Peale, R.E. ; Nelson, E.W. ; Muravjov, A.V. ; Walters, D.A. ; Subramanian, G. ; Sundaram, K.B. ; Fredricksen, C.J.
Pub. info.: Chemical and biological sensing IV : 21-22 April, 2003, Orlando, Florida, USA.  pp.119-125,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5085