1.

Conference Proceedings
Conference Proceedings
1. INVITED: PATHWAYS TO DRAM DESIGN AND TECHNOLOGY FOR THE 21ST CENTURY
Itoh, K. ; Sunami, H. ; Nakazato, K. ; Horiguchi, M.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.350-372,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
2.

Conference Proceedings
Conference Proceedings
2. FORMATION OF Si-ON-INSULATOR STRUCTURE UNDER SOLID PHASE GROWTH
Miyao, M. ; Moniwa, M. ; Warabisako, T. ; Sunami, H. ; Tokuyama, T.
Pub. info.: Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.705-710,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 35
3.

Conference Proceedings
Conference Proceedings
3. OXYGEN EXCHANGE PHENOMENA IN SiO2 DURING MICROWAVE-DISCHARGE PLASMA OXIDATION
Kimura, S-I ; Murakami, E. ; Warabisako, T. ; Mitani, E. ; Sunami, H.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.787-792,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75