1.

Conference Proceedings

Conference Proceedings
Lee, K.Y. ; Liew, S.L. ; Chua, S.J. ; Chi, D.Z. ; Sun, H.P. ; Pan, X.Q.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.55-60,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
2.

Conference Proceedings

Conference Proceedings
Yao, H.B. ; Chi, D.Z. ; Tripathy, S. ; Chow, S.Y. ; Wang, W.D. ; Chua, S.J. ; Sun, H.P. ; Pan, X.Q.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.165-170,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810