1.

Conference Proceedings
Conference Proceedings
1. Multiloop photolithography control using hierarchical context information for APC models
Stuber, J.D.
Pub. info.: Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA.  pp.75-82,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5044
2.

Conference Proceedings
Conference Proceedings
2. Model-Based Control of Rapid Thermal Processes
Stuber, J.D. ; Edgar, T.F. ; Brecdijk, T.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.113-147,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2