1.

Conference Proceedings
Conference Proceedings
1. Improved Process Window Using Low-Carbon GexSi1-x-yCy Epitaxial Layers
Mocuta, A. ; Greve, D. W. ; Strong, R. M.
Pub. info.: III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.287-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 535
2.

Conference Proceedings
Conference Proceedings
2. Demonstration of Deep (80 μm) RIE Etching of SiC for MEMS and MMIC Applications
Sheridan, D. C. ; Casady, J. B. ; Ellis, E. C. ; Siergiej, R. R. ; Cressler, J. D. ; Strong, R. M. ; Urban, W. M. ; Valek, W. F. ; Seiler, C. F. ; Buhay, H.
Pub. info.: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.1053-1056,  2000.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 338-342(2)