1.
|
Conference Proceedings
|
Algots, J.M. ; Sandstrom, R. ; Partlo, W.N. ; Maroevic, P. ; Eva, E. ; Gerhard, M. ; Linder, R. ; Stietz, F.
Pub. info.: |
Optical Microlithography XVI. Part Three pp.1639-1650, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5040 |
|
2.
|
Conference Proceedings
|
Vartanyan, T.A. ; Bosbach, J. ; Hendrich, C. ; Stietz, F. ; Traeger, F.
Pub. info.: |
Nanoscience Using Laser-Solid Interactions. pp.31-37, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4636 |
|