1.

Conference Proceedings
Conference Proceedings
1. Development of a high-average-power extreme-ultraviolet electric capillary discharge source
Fornaciari,N.R. ; Bender,H. ; Buchenauer,D. ; Kanouff,M.P. ; Karim,S. ; Kubiak,G.D. ; Moen,C.D. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewart,K.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.226-231,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Sub-100-nm lithographic imaging with an EUV 10X microstepper
Coldsmith,J.E.M. ; Berger,K.W. ; Bozman,D.R. ; Cardinale,G.F. ; Folk,D.R. ; Henderson,C.C. ; O'Connell,D.J. ; Ray-Chaudhuri,A.K. ; Stewart,K.D. ; Tichenor,D.A. ; Chapman,H.N. ; Gaughan,R.J. ; Hudyma,R.M. ; Montcalm,C. ; Taylor,J.S. ; Williams,J.D. ; Goldberg,K.A. ; Guliikson,E.M. ; Naulleau,P.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.264-271,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676