1.

Conference Proceedings
Conference Proceedings
1. Line-edge roughness in sub-0.18-ｦﾌm resist patterns
Palmateer,S.C. ; Cann,S.G. ; Curtin,J.E. ; Doran,S.P. ; Eriksen,L.M. ; Forte,A.R. ; Kunz,R.R. ; Lyszczarz,T.M. ; Stern,M.B. ; Nelson,C.M.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.634-642,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
2.

Conference Proceedings
Conference Proceedings
2. Laser micromachining of silicon: a new technique for fabricating terahertz imaging arrays
Walker,C.K. ; Hungerford,A.L. ; Narayanan,G. ; Groppi,C. ; Bloomstein,T.M. ; Palmacci,S.T. ; Stern,M.B. ; Curtin,J.E.
Pub. info.: Advanced technology MMW, radio, and terahertz telescopes : 26-28 March 1998, Kona, Hawaii.  pp.45-52,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3357