1.

Conference Proceedings
Conference Proceedings
1. Combined metrology in cluding VUV spectroscopic ellipsometry and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm
Boher,P. ; Evrard,P. ; Piel,J.-P. ; Janicot,S. ; Stehle,J.-L.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.654-664,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Characterization of resists and antireflective coatings by spectroscopic ellipsometry in the UV and deep-UV range
Boher,P. ; Piel,J.P. ; Defranoux,C. ; Stehle,J.-L. ; Hennet,L.
Pub. info.: Optical Microlithography IX.  Part2  pp.608-620,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726