1.

Conference Proceedings
Conference Proceedings
1. Formation of High-Quality Oxynitride Gate Dielectrics by High Pressure Thermal Oxidation of Si in NO
Song, S. C. ; Lee, C. H. ; Luan, H. F. ; Kwong, D. L. ; Gardner, M. ; Fulford, J. ; Allen, M. ; Bloom, J. ; Evans, R.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.65-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
2.

Conference Proceedings
Conference Proceedings
2. High-Quality Ultrathin CVD Si3N4 Gate Dielectrics Fabricated by Rapid Thermal Process
Song, S. C. ; Luan, H. F. ; Gardner, M. ; Fulford, J. ; Allen, M. ; Kwong, D. L.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.83-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567