1.

Conference Proceedings
Conference Proceedings
1. Stabilization of Low Dielectric Constant SiOF Films by Post-Deposition Annealing
Kim, H.-H. ; Lee, S.-K. ; Kim, S.-O. ; Kim, Y.-H. ; Kim, H.J. ; Sohn, Y.-S. ; Yang, H.-S. ; Kim, C.-T. ; Kim, D.H.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.126-135,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8
2.

Conference Proceedings
Conference Proceedings
2. Deposition and Characterization of SiOF Films for Multi-level IMD
Kim, H.-H. ; Lee, S.-K. ; Kim, S.-O. ; Kim, Y.-H. ; Kim, H.J. ; Sohn, Y.-S. ; Yang, H.-S. ; Kim, C.-T. ; Kim, D.-H.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.148-156,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8
3.

Conference Proceedings
Conference Proceedings
3. MEMS-based method of polymer bead handling for chemical array sensors
Park, B. ; Park, Y. S. ; Klm, J. W. ; Sohn, Y.-S. ; Neikirk, D. P.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.625-633,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
4.

Conference Proceedings
Conference Proceedings
4. Microfabrication of a multichannel microfluidic system for use with microbead reagent sources and detectors
Kim, J.W. ; Sohn, Y.-S. ; Neikirk, D.P.
Pub. info.: Microfluidics, bioMEMS, and medical microsystems III : 24-26 January 2005, San Jose, California, USA.  pp.265-271,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5718
5.

Conference Proceedings
Conference Proceedings
5. CD prediction by threshold energy resist model (TERM)
Yoo, J.-Y. ; Kwon, Y.-K. ; Park, J.-T. ; Sohn, D.-S. ; Kim, S.-G. ; Sohn, Y.-S. ; Oh, H.-K.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1287-1295,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
6.

Conference Proceedings
Conference Proceedings
6. Fabrication of bead-size sorting chip for chemical array sensor (Invited Paper)
Park, B.H. ; Park, Y.S. ; Sohn, Y.-S. ; Neikirk, D.P.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.303-313,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
7.

Conference Proceedings
Conference Proceedings
7. Rotating compensator spectroscopic ellipsometry for line-width control
Lee, H. ; Bang, K.-Y. ; Lee, J. ; Bak, H. ; Sohn, Y.-S. ; An, I.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.356-363,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
8.

Conference Proceedings
Conference Proceedings
8. Resist develop prediction by Monte Carlo simulation
Sohn, D.-S. ; Jeon, K.-A. ; Sohn, Y.-S. ; Oh, H.-K.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.971-977,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690