1.

Conference Proceedings
Conference Proceedings
1. Kohler illumination for high-resolution optical metrology [6152-152]
Sohn, Y. J. ; Barnes, B. M ; Howard, L. ; Silver, R. ; Attofa, R. ; Stocker, M. T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61523S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. Optical characteristics of holographic input-beam coupler using a photopolymer [6136-36]
Shin, C. W. ; Kim, J. H. ; Kim, N. ; Suh, D. W. ; Paek, M. C. ; Sohn, Y. J. ; Chung, H. S. ; Kang, K. Y.
Pub. info.: Practical Holography XX: Materials and Applications.  pp.61360Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6136