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19 results

Conference Proceedings

1. Micromechanical structures and microelectronics for acceleration sensing

Davies,B.R. ; Montague,S. ; Smith,J.H. ; Lemkin,M.

Pub. info.:	Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.237-244, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3223

Conference Proceedings

2. Planarization techniques for MEMS: enabling new structures and enhancing manufacturability

Smith,J.H.

Pub. info.:	Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India. pp.798-807, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3321

Conference Proceedings

3. Planar surface-micromachined pressure sensor with a subsurface,embedded reference pressure cavity

Eaton,W.P. ; Smith,J.H.

Pub. info.:	Micromachined devices and components II : 14-15 October 1996, Austin, Texas. pp.259-265, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2882

Conference Proceedings

4. Overview of micromachined platforms for thermal sensing and gas detection

Manginell,R.P. ; Smith,J.H. ; Ricco,A.J.

Pub. info.:	Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.273-284, 1997. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3046

Conference Proceedings

5. Critical issues for the application of integrated MEMS/CMOS technologies to inertial measurement units

Smith,J.H. ; Montague,S. ; Allen,J.J. ; Ellis,J.R. ; Burgett,S.M.

Pub. info.:	Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.242-247, 1997. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3046

Conference Proceedings

6. Micromachined pressure sensors:review and recent developments

Eaton,W.P. ; Smith,J.H.

Pub. info.:	Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.30-41, 1997. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3046

Conference Proceedings

7. High-G MEMS integrated accelerometer

Davies,B.R. ; Barron,C.Craig ; Montague,S. ; Smith,J.H. ; Murray,J.R. ; Christenson,T.R. ; Bateman,V.I.

Pub. info.:	Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.52-62, 1997. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3046

Conference Proceedings

8. Release-etch modeling for complex surface-micromachined structures

Eaton,W.P. ; Smith,J.H. ; Jarecki,R.L.

Pub. info.:	Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.80-93, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2879

Conference Proceedings

9. Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices

Pelt,J.S. ; Ramsey,M.E. ; Magana,R.,Jr. ; Poindexter,E.,Jr. ; Boer,M.P.de ; LaVan,D.A. ; Dugger,M.T. ; Smith,J.H. ; Durbin,S.M.

Pub. info.:	Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.76-84, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3874

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Conference Proceedings

10. Reproducibility data on SUMMiT

Limary,S. ; Stewart,H. ; Irwin,L.W. ; McBrayer,J. ; Sniegowski,J.J. ; Montague,S. ; Smith,J.H. ; Boer,M.P.de ; Jakubczak,J.F.

Pub. info.:	Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.102-112, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3874

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