1.

Conference Proceedings

Conference Proceedings
Eftekhari, A. ; Clair, A. K. St. ; Stoakley, D. M. ; Sprinkle, Danny R. ; Singh, J. J.
Pub. info.: Polymers for microelectronics : resists and dielectrics.  pp.535-,  1994.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 537
2.

Technical Paper

Technical Paper
Ranganathaiah, C. ; Pater, R. H. ; Sprinkle, D. R. ; Baugher, A. H. ; Eftekhari, A. ; Singh, J. J.
Pub. info.: NASA Technical Reports.  19960024146  (NASA-TM-111570),  pp.1-20,  1994.  National Aeronautics and Space Adminstration