Bouayadi, R. El ; Regula, G. ; Pichaud, B. ; Lancin, M. ; Simon, J.J. ; Ntsoenzok, E.
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Palais, O. ; Simon, J.J. ; Yakimov, E. ; Martinuzzi, S.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.233-240, 2001. Pennington, N.J.. Electrochemical Society