Chebiam, R. ; Cheng, C-C. ; Simka, H. ; Budrevich, A. ; Dubin, V.
Pub. info.:
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.40-46, 2003. Pennington, N.J.. Electrochemical Society
Redwing, J. M. ; Kuech, T. F. ; Simka, H. ; Jensen, K. F.
Pub. info.:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.201-, 1994. Pittsburgh, PA. MRS - Materials Research Society