1.

Conference Proceedings
Conference Proceedings
1. Metrology Issues in Cu-Low-k Chemical Mechanical Planarization
Zantye, Parshuram B. ; Sikder, Arun K. ; Thagella, Swetha ; Gulati, Nivedita ; Kumar, Ashok
Pub. info.: Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A..  pp.561-566,  2003.  Warrendale, Penn.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 750
2.

Conference Proceedings
Conference Proceedings
2. Polishing Behavior of the Various Interconnect Thin Films in Cu Damascene Process With Different Slurries
Zantye, Parshuram B. ; Sikder, Arun K. ; Kumara, Ashok
Pub. info.: Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.291-296,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 767
3.

Conference Proceedings
Conference Proceedings
3. Ionizing Radiation Effects on Interfaces in Carbon Nanotube-Polymer Composites
Harmon, Julie P. ; Muisener, Patricia Anne O. ; Clayton, LaNetra ; D'Angelo, John ; Sikder, Arun K. ; Kumar, Ashok ; Meyyappan, Meyya ; Cassell, Alan M.
Pub. info.: Surface engineering 2001 - fundamentals and applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A..  pp.425-438,  2002.  Warrendale, Penn.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 697
4.

Conference Proceedings
Conference Proceedings
4. Metrology of Psiloquest's Application Specific Pads (ASP) for CMP Applications
Zantye, Parshuram B. ; Mudhivarthi, S. ; Sikder, Arun K. ; Kumar, Ashok ; Obeng, Yaw
Pub. info.: Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.175-182,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 816