1.

Conference Proceedings
Conference Proceedings
1. ULTRASOUND TREATMENT OF CZ-Si WITH 'RING DEFECTS'
Ostapenko, S. ; Ikeda, N. ; Shimura, F.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.856-867,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. METALLIC IMPURITIES IN n- AND p-TYPE SILICON: DLTS STUDIES
Agarwal, Aditya ; Radzimaski, Z. J. ; Buczkowski, Z. ; Shimura, F. ; Rozgonyi, G. A.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.615-620,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
3.

Conference Proceedings
Conference Proceedings
3. DEEP LEVEL ENERGY ANALYSIS OF SURFACE AND BULK DEFECTS USING A NONCONTACT LASER/MICROWAVE PHOTOCONDUCTANCE TECHNIQUE
Buczkowski, A. ; Rozgonyi, G. A. ; Shimura, F.
Pub. info.: Photo-induced space charge effects in semiconductors: electro-optics, photoconductivity, and the photorefractive effect : symposium held April 29-May 1, 1992, San Francisco, California, U.S.A..  pp.235-240,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 261
4.

Conference Proceedings
Conference Proceedings
4. NONCONTACT CHARACTERIZATION FOR ULTRAVIOLET LIGHT IRRADIATION EFFECT ON Si-SiO2 INTERFACE
Katamaya, K. ; Shimura, F.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.1067-1072,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
5.

Conference Proceedings
Conference Proceedings
5. SURFACE RECOMBINATION VELOCITY AND RECOMBINATION LIFETIME IN IRON CONTAMINATED SILICON
Buczkowski, A. ; Shimura, F. ; Rozgonyi, G.A.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.495-504,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
6.

Conference Proceedings
Conference Proceedings
6. IN.SITU OBSERVATION OF DIFFUSION AND SEGREGATION OF Fe ATOMS IN Si CRYSTALS AT HIGH TEMPERATURE BY MOSSBAUER SPECTROSCOPY
Yoshida, Y. ; Shimura, F.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.984-996,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
7.

Conference Proceedings
Conference Proceedings
7. A STUDY OF SURFACE AND SUBSURFACE PROPERTIES OF Si(100) AFTER HYDROGEN ION-BEAM EXPOSURE
Liu, H. X. ; Schneider, T. P. ; Montgomery, J. ; Chen, Y. L. ; Buczkowski, A. ; Shimura, F. ; Nemanich, R. J. ; Maher, D. M. ; Korzec, D. ; Engemann, J.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.231-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
8.

Conference Proceedings
Conference Proceedings
8. ULTRAVIOLET (UV) IRRADIATION EFFECT ON MINORITY-CARRIER RECOMBINATION LIFETIME IN SILICON WAFERS WITH OXIDE AND NITRIDE FILMS
Zhong, L. ; Shimura, F.
Pub. info.: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.471-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 318
9.

Conference Proceedings
Conference Proceedings
9. Temperature Dependence of Effective Lifetime for N-Type Silicon Wafers: Metastable Surface Recombination Centers
Daio, H. ; Buczkowski, A. ; Shimura, F.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.265-274,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1
10.

Conference Proceedings
Conference Proceedings
10. Non-Contact Full Wafer Evaluation of Deep Levels in Silicon Via Temperature Dependent Surface Recombination Velocity, and Carrier Lifetime
Buczkowski, A. ; Rozgonyi, G.A. ; Shimura, F.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II.  pp.1-14,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-3