Sugiyama, M. ; Nakajima, T. ; Tanaka, T. ; Itoh, H. ; Aoyama, J. ; Egashira, Y. ; Yamashita, K. ; Komiyama, H. ; Shimogaki, Y.
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Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.56-67, 1999. Pennington, N.J.. Electrochemical Society
Mishima, Y. ; Kaida, N. ; Sugiyama, M. ; Shimogaki, Y. ; Nakano, Y.
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Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.364-369, 1998. Pennington, NJ. Electrochemical Society
Fujino, K. ; Egashira, Y. ; Shimogaki, Y. ; Komiyama, H.
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Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.559-569, 1994. Pennington, NJ. Electrochemical Society
Sugiyama, M. ; Shimogaki, Y. ; Sudo, S. ; Nakano, Y. ; Sugawara, K. ; Tada, K. ; Komiyama, H.
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Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.909-916, 1997. Pennington, NJ. Electrochemical Society
Li, N. ; Waki, I. ; Kumtornkittikul, C. ; Liang, J.-H. ; Sugiyama, M. ; Shimogaki, Y. ; Nakano, Y.
Pub. info.:
State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia. pp.270-275, 2004. Pennington, N.J.. Electrochemical Society