1.

Conference Proceedings
Conference Proceedings
1. Development of a high-average-power extreme-ultraviolet electric capillary discharge source
Fornaciari,N.R. ; Bender,H. ; Buchenauer,D. ; Kanouff,M.P. ; Karim,S. ; Kubiak,G.D. ; Moen,C.D. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewart,K.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.226-231,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Development of an electric capillary discharge source
Fornaciari,N.R. ; Chang,J.J. ; Folk,D.R. ; Gianoulakis,S.E. ; Goldsmith,J.E.M. ; Kubiak,G.D. ; Long,B.C. ; O'Connell,D.J. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewartka,K.D.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.120-125,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
3.

Conference Proceedings
Conference Proceedings
3. Debris-free laser plasma source using ice droplets
Richardson,M.C. ; Torres,D.S. ; DePriest,C. ; Jin,F. ; Shimkaveg,G.M.
Pub. info.: Applications of X rays generated from lasers and other bright sources : 31 July-1 August 1997, San Diego, California.  pp.306-309,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3157
4.

Conference Proceedings
Conference Proceedings
4. High-power plasma discharge source at 13.5 nm and 11.4 nm for EUV lithography
Silfvast,W.T. ; Klosner,M. ; Shimkaveg,G.M. ; Bender,H. ; Kubiak,G.D. ; Fornaciari,N.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.272-275,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
5.

Conference Proceedings
Conference Proceedings
5. 10-TW femtosecond laser plasma facility
Richardson,M.C. ; Grantham,S.E. ; Gabel,K. ; Shimkaveg,G.M. ; Beaud,P.
Pub. info.: Solid State Lasers for Application to Inertial Confinement Fusion (ICF).  pp.324-336,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2633