1.

Conference Proceedings
Conference Proceedings
1. Inverse lithography technology at chip scale [6154-41]
Lin, B. ; Shieh, M. F. ; Sun, J. ; Ho, J. ; Wang, Y. ; Wu, X. ; Leitermann, W. ; Lin, O. ; Lin, J. ; Liu, Y. ; Pang, L.
Pub. info.: Optical Microlithography XIX.  pp.615414-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. Real-world impacts of inverse lithography technology [5992-72]
Ho, J. ; Wang, Y. ; Wu, X. ; Xilinx Inc. (USA) ; Lin, B. ; Shieh, M. F. ; Sun, J. ; Lin, O. ; Lin, J. ; Liu, Y. ; Pang, L.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921Z-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992