1.

Conference Proceedings
Conference Proceedings
1. Effect of Aging on Stress in Silicon Nitride Films by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition Technique.
Sah, R.E. ; Baumann, H. ; Serries, D. ; Kiefer, R. ; Braunstein, J.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium.  pp.26-37,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-6
2.

Conference Proceedings
Conference Proceedings
2. Thermally Induced Stress Changes in High Density Plasma Deposited Silicon Nitride Films
Shah, R.E. ; Baumann, H. ; Serries, D. ; Mikulla, M. ; Keiffer, R.
Pub. info.: Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium.  pp.253-263,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-7
3.

Conference Proceedings
Conference Proceedings
3. Dilute Group III-AsN: Bonding of Nitrogen in GaInAsN and AlGaAsN on GaAs and Realization of Long Wavelength (2.3μm) GaInAsN QWs on InP
Serries, D. ; Geppert, T. ; Kohler, K. ; Ganser, P. ; Wagner, J.
Pub. info.: Progress in semiconductors II : electronic and optoelectronic applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A..  pp.627-636,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 744