1.

Conference Proceedings
Conference Proceedings
1. Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination
Kirchauer,H. ; Selberherr,S.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.764-776,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Technology CAD for Smart Power Devices
Plasun,R. ; Pichler,Ch. ; Simlinger,T. ; Selberherr,S.
Pub. info.: Physics of - Semiconductor Devices -.  Part 1  pp.481-488,  1998.  New Delhi.  Narosa Publishing House
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3316
3.

Conference Proceedings
Conference Proceedings
3. Extensible TCAD optimization framework combinbing gradient-based and genetic optimizers
Heitzinger,C. ; Selberherr,S.
Pub. info.: Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore.  pp.279-289,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4228
4.

Conference Proceedings
Conference Proceedings
4. Influence of dopant species on electron mobility in heavily doped semiconductors
Kaiblinger-Grujin,G. ; Kosina,H. ; Kopf,Ch. ; Selberherr,S.
Pub. info.: Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997.  Part2  pp.939-944,  1997.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 258-263