1.

Conference Proceedings
Conference Proceedings
1. Manufacturing of microcomponents in a research institute under DIN EN ISO 9001
Maas,D. ; Karl,B. ; Saile,V. ; Schulz,J.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.416-426,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
2.

Conference Proceedings
Conference Proceedings
2. Time-resolved measurement of gas parameters inside diffusion-cooled CO2 lasers with NIR diode laser and UV-VIS emission spectroscopy
Engelbrecht,R. ; Schulz,J.
Pub. info.: XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 18-22 September 2000.  pp.278-281,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4184
3.

Conference Proceedings
Conference Proceedings
3. LIGA technology today and its industrial applications
Chung,S-J. ; Hein,H. ; Mohr,J. ; Pantenburg,F.-J. ; Schulz,J. ; Wallrabe,U.
Pub. info.: Microrobotics and microassembly II : 5-6 November 2000, Boston.  pp.44-55,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4194
4.

Conference Proceedings
Conference Proceedings
4. Simulation of structure profiles in optical lithography of thick DNQ-novolak-based photoresists
Chung,S.-J. ; Schulz,J. ; Hein,H. ; Mohr,J.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part2  pp.1226-1235,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
5.

Conference Proceedings
Conference Proceedings
5. Thermographic Characterisation of Polymers for the Laser Transmission Welding (550)
Haberstroh,E. ; Schulz,J. ; Luetzeler,R.
Pub. info.: ANTEC 2002, annual technical conference, San Francisco, CA, May 5-9, 2002.  1  pp.1137-1141,  2002.  Brookfield, Conn..  Society of Plastic Engineers.
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 60
6.

Conference Proceedings
Conference Proceedings
6. Polymers with high-temperature stability structured by ion irradiation :irradiation parameters and optical characterization of resulting waveguides
Ruck,D.M. ; Schulz,J. ; Frank,W.F.X.
Pub. info.: Photopolymer device physics, chemistry, and applications III : 7 August 1996, Denver, Colorado.  pp.118-128,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2851