1.

Conference Proceedings
Conference Proceedings
1. Development of advanced second-generation micromirror devices fabricated in a four-level planarized surface-micromachined polycrystalline silicon process
Michalicek,M.A. ; Comtois,J.H. ; Schriner,H.K.
Pub. info.: Spatial light modulators : 28-29 January 1998, San Jose, California.  pp.71-80,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3292
2.

Conference Proceedings
Conference Proceedings
2. Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process
Michalicek,M.A. ; Comtois,J.H. ; Schriner,H.K.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics III.  pp.48-55,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3276