1.

Conference Proceedings
Conference Proceedings
1. Integrated metrology: an enabler for advanced process control (APC)
Schneider,C. ; Pfitzner,L. ; Ryssel,H.
Pub. info.: In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK.  pp.118-130,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4406
2.

Conference Proceedings
Conference Proceedings
2. Computer-aided design tools for economical MEMS fabrication processes
Schneider,C. ; Priebe,A. ; Bruck,R. ; Hahn,K.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.290-297,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
3.

Conference Proceedings
Conference Proceedings
3. Equipment and wafer modeling of batch furnaces by neural networks
Benesch,N. ; Schneider,C. ; Lehnert,W. ; Pfitzner,L. ; Ryssel,H.
Pub. info.: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland.  pp.2-12,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3742
4.

Conference Proceedings
Conference Proceedings
4. Component-based assiatants for MEMS design tools
Hahn,K. ; Bruck,R. ; Schneider,C. ; Schumer,C. ; Popp,J.
Pub. info.: MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK.  pp.45-53,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4407
5.

Conference Proceedings
Conference Proceedings
5. Application and cost analysis of scatterometry for integrated metrology
Benesch,N. ; Schneider,C. ; Pfitzner,L. ; Ryssel,H.
Pub. info.: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.25-32,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3743
6.

Technical Paper
Technical Paper
6. Application of a Bituminous Fuel in Diesel Engines
Ahrenfeldt,J. ; Hagenau,J. ; Schneider,C. ; Schramm,J. ; Houbak,N.
Pub. info.: Alternative fuels.  pp.191-204,  1999.  Warrendale, Pa..  Society of Automotive Engineering, Inc.
Title of ser.: SAE special publication
Ser. no.: SP-1482
7.

Conference Proceedings
Conference Proceedings
7. Advanced process control system for vertical furnaces
Berger,R. ; Schneider,C. ; Lehnert,W. ; Pfitzner,L. ; Ryssel,H.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II.  pp.16-26,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2876