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12 results

Conference Proceedings

1. INVITED: GETTERING EFFICIENCIES AND THEIR DEPENDENCE ON MATERIAL PARAMETERS AND THERMAL PROCESS: HOW CAN THIS BE MODELED?

HoeIzl, R. ; Blietz, M. ; Fabry, L. ; Schmolke, R.

Pub. info.:	Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.608-625, 2002. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-2

Conference Proceedings

2. Inspection of silicon wafer backsurfaces

Schmolke, R. ; Passek, F. ; Gerber, H.-A. ; Lambert, U. ; Puppe, G. ; Piontek, H. ; Wagner, P.

Pub. info.:	Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.448-457, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-22

Conference Proceedings

3. Discrimination of defects on epitaxial silicon wafers

Passek, F. ; Schmolke, R. ; Lambert, U. ; Puppe, G. ; Wagner, P.

Pub. info.:	Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.438-447, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-22

Conference Proceedings

4. Advanced Silicon Wafers for 0.18 μm Design Rule and Beyond: Epi and fFLASH!*

Schmolke, R. ; Blietz, M. ; Schauer, R. ; Zemke, D. ; Oelkrug, H. ; Ammon, W.v. ; Lambert, U. ; Grtlf, D.

Pub. info.:	High Purity Silicon VI : proceedings of the sixth International Symposium. pp.3-18, 2000. Bellingham, Wash.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-17

Conference Proceedings

5. The Impact of Crystal Quality by Delineation of COP and the Impact on the Silicon Wafer Surface

Graef, D. ; Suhren, M. ; Lambert, U. ; Schmolke, R. ; Ehiert, A. ; Ammon, W.v. ; Wagner, P.

Pub. info.:	Proceedings of the Fourth International Symposium on High Purity Silicon. pp.117-131, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-13

Conference Proceedings

6. 300 mm Epi PP Wafer: Is There Sufficient Gettering?

Graff, D. ; Lambert, U. ; Schmolke, R. ; Wablich, R. ; Siebert, W. ; Daub, E. ; Ammon, W.v.

Pub. info.:	High Purity Silicon VI : proceedings of the sixth International Symposium. pp.319-330, 2000. Bellingham, Wash.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-17

Conference Proceedings

7. DEFECT DEPTH PROFILE IN Si(IOO) P/P- EPITAXIAL WAFERS

Schmolke, R. ; Feijo, D. ; Ostermeir, R. ; Schauer, R. ; Furukawa, S. ; Graef, D.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.855-868, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(1)

Conference Proceedings

8. Crystal Related Surface Defects: Review, Progress and Outlook

Schmolke, R. ; Orlif, D.

Pub. info.:	Proceedings of the Third International Symposium on Defects in Silicon. pp.386-400, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-1

Conference Proceedings

9. Impact of Chemical and Epitaxial Treatment on Surface Defects on Silicon Wafers

Schmolke, R. ; Graf, D. ; Suhren, M. ; Kirchner, R. ; Piontek, H. ; Wagner, P.

Pub. info.:	Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.137-, 1997. Pittsburgh, Penn. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	442

10.

Conference Proceedings

10. INVITED: GETTERING EFFICIENCIES AND THEIR DEPENDENCE ON MATERIAL PARAMETERS AND THERMAL PROCESS: HOW CAN THIS BE MODELED?

HoeIzl, R. ; Blietz, M. ; Fabry, L. ; Schmolke, R.

Pub. info.:	Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.608-625, 2002. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-2

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Author: Schmolke, R.