1.

Conference Proceedings
Conference Proceedings
1. Dynamic characterization of step-induced vibrations of x-ray mask membranes
Schlax,M.P. ; Engelstad,R.L. ; Lovell,E.G.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.629-637,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
2.

Conference Proceedings
Conference Proceedings
2. Finite element modeling of SCALPEL masks
Engelstad,R.L. ; Lovell,E.G. ; Dicks,G.A. ; Martin,C.J. ; Schlax,M.P. ; Semke,W.H. ; Liddle,J.A. ; Novembre,A.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.128-139,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
3.

Conference Proceedings
Conference Proceedings
3. Stress mapping techniques for the SCALPEL mask membrane system
Schlax,M.P. ; Engelstad,R.L. ; Lovell,E.G. ; Liddle,J.A. ; Novembre,A.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.152-161,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
4.

Conference Proceedings
Conference Proceedings
4. Comparison of substrate curvature and resonant frequency thin film stress mapping techniques
Schlax,M.P. ; Engelstad,R.L. ; Lovell,E.G. ; Brooks,C.J. ; Magg,C.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.539-548,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
5.

Conference Proceedings
Conference Proceedings
5. Film stress changes during anodic bonding of NGL masks
Cotte,E.P. ; Schlax,M.P. ; Engelstad,R.L. ; Lovell,E.G. ; Brooks,C.J.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.515-524,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
6.

Conference Proceedings
Conference Proceedings
6. Modal analysis of the SCALPEL mask using experimental and numerical methods
Semke,W.H. ; Schlax,M.P. ; Engelstad,R.L. ; Lovell,E.G. ; Liddle,J.A.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.556-567,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
7.

Conference Proceedings
Conference Proceedings
7. Experimental model verification of the thermal response of optical reticles
Abdo,A.Y. ; Reu,P.L. ; Schlax,M.P. ; Engelstad,R.L. ; Beckman,W.A. ; Mitchell,J.W. ; Lovell,E.G.
Pub. info.: Optical Microlithography XIV.  4346  pp.1478-1483,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
8.

Conference Proceedings
Conference Proceedings
8. Mechanical analysis of hard pellicles for 157-nm lithography
Reu,P.L. ; Mikkelson,A.R. ; Schlax,M.P. ; Cotte,E.P. ; Siewert,L.K. ; Engelstad,R.L. ; Lovell,E.G. ; Dao,G.T. ; Zheng,J.-F.
Pub. info.: Optical Microlithography XIV.  4346  pp.1166-1174,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346