1.

Conference Proceedings
Conference Proceedings
1. Advanced Silicon Wafers for 0.18 μm Design Rule and Beyond: Epi and fFLASH!*
Schmolke, R. ; Blietz, M. ; Schauer, R. ; Zemke, D. ; Oelkrug, H. ; Ammon, W.v. ; Lambert, U. ; Grtlf, D.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.3-18,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
2.

Conference Proceedings
Conference Proceedings
2. DEFECT DEPTH PROFILE IN Si(IOO) P/P- EPITAXIAL WAFERS
Schmolke, R. ; Feijo, D. ; Ostermeir, R. ; Schauer, R. ; Furukawa, S. ; Graef, D.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.855-868,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)