1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF SILICON OXIDE ETCHING IN HF VAPOR PROCESSES
Han, Y.-P. ; Lawing, S. ; Sawin, H.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.423-430,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. Effects of Ambient and Annealing on the Thermal Stability of Pulsed Plasma Deposited Flurocarbon Films
Cruden, B. ; Chu, K. ; Gleason, K. ; Sawin, H.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.291-302,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
3.

Conference Proceedings
Conference Proceedings
3. SURFACE ANALYSIS OF CLUSTERED DRY CLEANING OF RESIDUE FROM AN ICP OXIDE ETCH
Lawing, A. ; Han, Y.-P. ; Sawin, H.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.431-438,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
4.

Conference Proceedings
Conference Proceedings
4. Post Oxide Etching Cleaning Process Using Integrated Ashing and HF Vapor Process
Kwon, O. ; Sawin, H.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.166-179,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
5.

Conference Proceedings
Conference Proceedings
5. THE MECHANISM OF COPPER REMOVAL FROM A BARE SILICON SURFACES WITH ULTRAVIOLET EXCITED CHLORINE
Lawing, A. ; Sawin, H. ; Fayfield, T.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.299-306,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
6.

Conference Proceedings
Conference Proceedings
6. Thermal Decomposition of Low-k Pulsed Plasma Fluorocarbon Films
Cruden, B. ; Chu, K. ; Gleason, K. ; Sawin, H.
Pub. info.: Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability.  pp.153-164,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-6