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13 results

Conference Proceedings

1. Novel Germanium Technology and Devices for High Performance MOSFETs and Integrated On-Chip Optical Clocldng

Saraswat, K.C. ; Chui, CO. ; McIntyre, P.C. ; Triplett, B.B.

Pub. info.:	Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.55-65, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-2

Conference Proceedings

2. LOW PRESSURE CHEMICAL CAPOR DEPOSITION OF Si-X GeX FILMS

Cao, M. ; Wang, A.W. ; Saraswat, K.C.

Pub. info.:	Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.350-356, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-6

Conference Proceedings

3. 37 High-k dielectric processing for germanium channel MOSFETs

Alclntyre, P.C. ; Chi, D. ; Kim, H. ; Chui, C.O. ; Fripleti, B.B. ; Saraswat, K.C.

Pub. info.:	Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.295-304, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-14

Conference Proceedings

4. Performance Limitations of Metal Interconnects and Possible Alternatives*

Saraswat, K.C. ; Kapur, P. ; Souri, S.

Pub. info.:	ULSI Process Integration : proceedings of the International Symposium. pp.194-205, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-6

Conference Proceedings

5. Profile Simulation Studies Of Oxide Deposition From Ozone/TEOS

Li, J. ; McVittie, J.P. ; Ferziger, J. ; Saraswat, K.C. ; Schmidt, M. ; Dobkin, D.

Pub. info.:	Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.570-580, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-16

Conference Proceedings

6. Sub-Micron Thin Film Transistors with Metal Induced Lateral Crystallization

Joshi, A.R. ; Saraswat, K.C.

Pub. info.:	ULSI process integration : proceedings of the first international symposium. pp.361-366, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-18

Conference Proceedings

7. MODELING OF PROFILE EVOLUTION IN DIAMOND CVD

IslamRaja, M.M. ; Cappelli, M.A. ; McVittie, J.P. ; Saraswat, K.C.

Pub. info.:	Proceedings of the Third International Symposium on Diamond Materials. pp.276-282, 1993. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-17

Conference Proceedings

8. A Low Temperature Polycrystalline SiGe CMOS TFT Technology for Large Area AMLCD Drivers

Saraswat, K.C. ; Jurichich, S. ; King, T.J. ; Subramanian, V. ; Wang, A.

Pub. info.:	Proceedings of the Third Symposium on Thin Film Transistor Technologies. pp.186-196, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-23

Conference Proceedings

9. Effect of Interface Stress on Reliability of Gate Oxide

Yang, T.C. ; Bhat, N. ; Saraswat, K.C.

Pub. info.:	Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.34-45, 1997. Pennington, New Jersey. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-10

10.

Conference Proceedings

10. PROFILE MODELING OF PHYSICAL VAPOR DEPOSITIN OF Ti AND Wsi

Eguchi, Y. ; IslamRaja, M.M. ; McVittie, J.P. ; Saraswat, K.C.

Pub. info.:	Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.301-309, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-6

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