1.

Conference Proceedings
Conference Proceedings
1. Tantalum Pentoxide for Advanced DRAM Applications
McKinley, K. A. ; Sandler, N. P.
Pub. info.: Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A..  pp.299-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 446
2.

Conference Proceedings
Conference Proceedings
2. Two Step O2/N2O Plasma Annealing for the Reduction of Leakage Current in Amorphous Ta2O5 Films
Lau, W. S. ; Perera, M. T. Chandima ; Han, T. ; Sandler, N. P. ; Tung, C. H. ; Sheng, T. T. ; Chu, P. K. ; Chong, T. C.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.501-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567