1.

Conference Proceedings
Conference Proceedings
1. Silicon-Oxynitride Layers For Optical Waveguide Applications
Germann, R. ; Salemink, H.W.M. ; Beyeler, R. ; Bona, G.L. ; Horst, F. ; Massarek, I. ; Offrein, B.J.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium.  pp.169-182,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-6
2.

Conference Proceedings
Conference Proceedings
2. Deep dry etching process development for photonic crystals in InP-based planar waveguides
van der Heijden, R.W. ; Andriesse, M.S.P. ; Carlstrom, C.-F. ; van der Drift, E. ; Geluk, E.-J. ; Karouta, A.F. ; Nouwens, P.A. ; Oei, Y.S. ; de Vries, T. ; Salemink, H.W.M.
Pub. info.: Photonic Crystal Materials and Nanostructures.  pp.523-532,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5450