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37 results

Conference Proceedings

1. High-precision 2D angle measurement using fringe analysis techniques

Ge,Z. ; Saito,T. ; Matsuda,S. ; Takeda,M.

Pub. info.:	Optical manufacturing and testing IV : 31 July-2 August 2001, San Diego, USA. pp.448-457, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4451

Conference Proceedings

2. Measurement of total integrated scatter of optical coatings for 157-nm lithography

Saito,T. ; Saito,J. ; Nakamura,E. ; Kudo,T. ; Kagaya,M. ; Takahashi,T.

Pub. info.:	Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA. pp.22-29, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4449

Conference Proceedings

3. Line-narrowed ArF excimer laser for 193-nm lithography

Saito,T. ; Mitsuhashi,K. ; Arai,M. ; Seki,K. ; Tada,A. ; Igarashi,T. ; Hotta,K.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.1069-1075, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

4. Numerical analysis of enhanced backscattering from random fractal media

Uozumi,J. ; Saito,T.

Pub. info.:	Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan. pp.557-560, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3740

Conference Proceedings

5. ArF excimer-laser exposure durability of chromium-fluoride-attenuated phase-shift masks

Seki,Y. ; Ushioda,J. ; Saito,T. ; Maeda,K. ; Nakano,K. ; Iwasa,S. ; Ohfuji,T. ; Tanabe,H.

Pub. info.:	Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan. pp.286-293, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3096

Conference Proceedings

6. Development of smart systems for building structures

Otani,S. ; Hiraishi,H. ; Midorikawa,M. ; Teshigawara,M. ; Fujitani,H. ; Saito,T.

Pub. info.:	Smart structures and materials 2000 : smart systems for bridges, structures, and highways : 6-7 March 2000, Newport Beach, California. pp.2-9, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3988

Conference Proceedings

7. Acquisition of 3D image representation in multimedia ambiance communication using 3D laser scanner and digital camera

Kanamaru,T. ; Yamada,K. ; Ichikawa,T. ; Naemura,T. ; Aizawa,K. ; Saito,T.

Pub. info.:	Three-dimensional image capture and applications III : 24-25 January 2000, San Jose, California. pp.80-89, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3958

Conference Proceedings

8. Fluorescence microscopic system for detection of microorganisms and organic compounds on Mars

Saito,T. ; Kawasaki,Y. ; Kaneko,T. ; Kobayashi,K. ; Miyakawa,A.

Pub. info.:	Instruments, methods, and missions for astrobiology II : 20-22 July 1999, Denver, Colorado. pp.24-32, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3755

Conference Proceedings

9. High-repetition-rate ArF excimer laser for 193-nm lithography

Kakizaki,K. ; Saito,T. ; Mitsuhashi,K. ; Arai,M. ; Tada,A. ; Kasahara,S. ; Igarashi,T. ; Hotta,K.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1397-1404, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

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Conference Proceedings

10. Structure analysis of natural scenes using census transform and region competition

Yamada,K. ; Ichikawa,T. ; Naemura,T. ; Aizawa,K. ; Saito,T.

Pub. info.:	Visual communications and image processing 2001 : 24-26 January, 2001, San Jose, USA. pp.228-237, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4310

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