1.

Conference Proceedings

Conference Proceedings
Nishiyama, H. ; Sano, T. ; Ohmura, E. ; Miyamoto, I. ; Matsumoto, S.- ; Saito, M. ; Kintaka, K. ; Nishii, J.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.491-494,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
2.

Conference Proceedings

Conference Proceedings
Ohguro, T. ; Nakamura, S. ; Saito, M. ; Ono, S. ; Harakawa, H. ; Morifuji, E. ; Yoshitomi, T. ; Morimoto, T. ; Momose, H.S. ; Katsumata, Y. ; Iwai, H.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.275-296,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
3.

Conference Proceedings

Conference Proceedings
Saito, M. ; Ishiwara, N. ; Ohashi, K.
Pub. info.: Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium.  pp.185-196,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-29
4.

Conference Proceedings

Conference Proceedings
Ohashi, K. ; Saito, M. ; Honjo, H. ; Toba, T. ; Nonaka, Y. ; Ishiwata, N.
Pub. info.: Electrochemical technology applications in electronics : proceedings of the third international symposium.  pp.241-249,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-34
5.

Conference Proceedings

Conference Proceedings
Jablonski, J. ; Saito, M. ; Miyamura, Y. ; Katayama, T.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.51-56,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
6.

Conference Proceedings

Conference Proceedings
Saito, M. ; Yamada, K. ; Matsumura, K.
Pub. info.: Proceedings of the Symposia on Fundamentals of Electrochemical Process Design: a tutorial and Anodic Processes: Fundamental and Applied Aspects.  pp.361-369,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-11
7.

Conference Proceedings

Conference Proceedings
Saito, M. ; Kitamura, N. ; Terauchi, M.
Pub. info.: BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia.  pp.26-37,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4590
8.

Conference Proceedings

Conference Proceedings
Yoda, S. ; Nakamura, T. ; Yoshitomi, S. ; Saito, M.
Pub. info.: Proceedings of the VIIIth European Symposium on Materials and Fluid Sciences in Microgravity, Université Libre de Bruxelles, Belgium, 12-16 April 1992.  pp.447-454,  1992.  Noordwijk.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 333
9.

Conference Proceedings

Conference Proceedings
Tomita, H. ; Saito, M. ; Nadahara, S. ; Shiotani, H. ; Muraoka, H.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.422-431,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
10.

Conference Proceedings

Conference Proceedings
Banba, T. ; Matsumoto, S. ; Muraoka, S. ; Yamada, K. ; Saito, M. ; Ishikawa, H. ; Sasaki, N.
Pub. info.: Scientific basis for nuclear waste management XVIII : symposium held October 23-27, 1994, Kyoto, Japan.  pp.1397-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 353