Saifullah, M. S. M. ; Namatsu, H. ; Yamaguchi, T. ; Yamazaki, K. ; Kurihara, K.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.633-642, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Saifullah, M. S. M. ; Boothroyd, C. B. ; Botton, G. A. ; Humphreys, C. J.
Pub. info.:
Thermodynamics and kinetics of phase transformations : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.195-, 1996. Pittsburgh, Penn.. MRS - Materials Research Society
Conference Proceedings
