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13 results

Conference Proceedings

1. Process window study with various illuminations for EUV lithography applications

S. H. Lee ; Z. Zhang

Pub. info.:	Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6517

Conference Proceedings

2. Application of time sampling in brain CT perfusion imaging for dose reduction

S. H. Lee ; J. H. Kim ; K. G. Kim ; S. J. Park ; J. G. Im

Pub. info.:	Medical Imaging 2007: Physics of Medical Imaging. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6510

Conference Proceedings

3. Image placement error of photomask due to pattern loading effect: analysis and correction technique for sub-45 nm node

J. Choi ; S. H. Lee ; D. Nam ; B. G. Kim ; S. -G. Woo

Pub. info.:	Photomask and next-generation lithography mask technology XV. 2 pp.70281X-1-70281X-13, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7028

Conference Proceedings

4. Accurate measurement of respiratory airway wall thickness in CT images using a signal restoration technique

S. J. Park ; T. J. Kim ; K. G. Kim ; S. H. Lee ; J. M. Goo

Pub. info.:	Medical imaging 2008. 2 pp.691336-1-691336-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6913

Conference Proceedings

5. Low-cost EUV collector development: design, process, and fabrication

R. D. Venables ; M. Goldstein ; D. Engelhaupt ; S. H. Lee ; E. M. Panning

Pub. info.:	Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6517

Conference Proceedings

6. Stretched polymer nanohairs by nanodrawing

H. E. Jeong ; S. H. Lee ; P. Kim ; K. Y. Suh

Pub. info.:	Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6517

Conference Proceedings

7. Polymer structure modifications for immersion leaching control

S. H. Lee ; J. W. Kim ; S. K. Oh ; C. S. Park ; J. Y. Lee ; S. S. Kim ; J. W. Lee ; D. Kim ; J. Kim ; K. D. Ban ; C. K. Bok ; S. C. Moon

Pub. info.:	Advances in resist materials and processing technology XXIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6519

Conference Proceedings

8. Modified polymer architecture for immersion lithography

S. S. Kim ; J. W. Kim ; J. Y. Lee ; S. K. Oh ; S. H. Lee ; J. W. Lee ; D. bae Kim ; J. Kim ; K. D. Ban ; C. K. Bok ; S. Moon

Pub. info.:	Advances in resist materials and processing technology XXIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6519

Conference Proceedings

9. Requirements of photomask registration for the 45nm node and beyond: Is it possible?

J. Choi ; H. B. Kim ; S. H. Lee ; D. H. Lee ; H. Y. Jeong

Pub. info.:	Photomask technology 2007. 1 pp.67301O-1-67301O-10, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6730

10.

Conference Proceedings

10. Electrokinetic elongation and subsequent dispersion of carbon nanotubes in liquid crystal medium

S. H. Lee ; S. J. Jeong ; A. K. Srivastava ; M. Kim ; E. M. Jo

Pub. info.:	Carbon nanotubes and associated devices : 10-12 August 2008, San Diego, California, USA. pp.70370I-1-70370I-6, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7037

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Author: S. H. Lee