1.

Conference Proceedings
Conference Proceedings
1. Advanced process control of poly silicon gate critical dimensions [6155-09]
Rudolph, P.
Pub. info.: Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA.  pp.61550B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6155
2.

Conference Proceedings
Conference Proceedings
2. Real-time temperature characterization and monitoring as a method of fault isolation
Rudolph, P. ; Kato, L.
Pub. info.: Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA.  pp.99-106,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5755
3.

Conference Proceedings
Conference Proceedings
3. Oxide etch rate estimation using plasma impedance monitoring
Tsunami, D. ; McNames, J. ; Whitefield, B. ; Rudolph, P. ; Zola, J.
Pub. info.: Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA.  pp.59-68,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5755
4.

Conference Proceedings
Conference Proceedings
4. Nonaqueous Synthesis of Large Zeolite and Molecular Sieve Crystals
Nadimi, S. ; Oliver, S. ; Kuperman, A. ; Lough, A. ; Ozin, G. A. ; Garces, J. M. ; Olken, M. M. ; Rudolph, P.
Pub. info.: Zeolites and related microporous materials : state of the art 1994 : proceedings of the 10th International Zeolite Conference, Garmisch-Partenkirchen, Germany, July 17-22, 1994.  A  pp.93-,  1994.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 84
5.

Conference Proceedings
Conference Proceedings
5. New Insights into the Mode of Formation of AlPO4-n Molecular Sieves
Oliver, S. ; Kuperman, A. ; Lough, A. ; Ozin, G. A. ; Garces, J. M. ; Olken, M. M. ; Rudolph, P.
Pub. info.: Zeolites and related microporous materials : state of the art 1994 : proceedings of the 10th International Zeolite Conference, Garmisch-Partenkirchen, Germany, July 17-22, 1994.  A  pp.219-,  1994.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 84
6.

Conference Proceedings
Conference Proceedings
6. Properties of Zinc Selenide Grown by Chemical Vapor Transport and Its Application to Room-Temperature Radiation Detection
Brunett, B. A. ; Toney, J. E. ; Yoon, H. ; Rudolph, P. ; Schieber, M. ; Schlesinger, T. E. ; Goorsky, M. S. ; James, R. B.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.499-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
7.

Conference Proceedings
Conference Proceedings
7. Wafer sampling by regression for systematic wafer variation detection
Moon, B. ; McNames, J. ; Whitefield, B. ; Rudolph, P. ; Zola, J.
Pub. info.: Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA.  pp.212-221,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5755
8.

Conference Proceedings
Conference Proceedings
8. Ultrashort pulse lasers: new aspects of materials interaction
Kautek, W. ; Rudolph, P. ; Daminelli, G. ; Hertwig, A. ; Martin, S. ; Bonse, J. ; Krueger, J.
Pub. info.: High-Power Laser Ablation V.  pp.213-224,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5448
9.

Conference Proceedings
Conference Proceedings
9. Experimental study of contact edge roughness on sub-100 nm various circular shapes
Rudolph, P. ; Bradford, S. M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.516-526,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752