1.

Conference Proceedings
Conference Proceedings
1. DIRECTIONAL SPUTTER DEPOSITION FOR SEMICONDUCTOR APPLICATIONS
Rossnagel, S. M.
Pub. info.: Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.503-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 354
2.

Conference Proceedings
Conference Proceedings
2. Extendibility of Cu Damascene to 0.1 ｦﾌm Wide Interconnections
Hu, C-K. ; Lee, K. Y. ; Gignac, L. ; Rossnagel, S. M. ; Uzoh, C. ; Chan, K. ; Roper, P. ; Harper, J. M. E.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.287-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
3.

Conference Proceedings
Conference Proceedings
3. *Properties and decomposition behaviors of reactively sputtered Pt(O) electrode materials
Saenger, K. L. ; Rossnagel, S. M.
Pub. info.: Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.57-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 596
4.

Conference Proceedings
Conference Proceedings
4. Surface-Topography Simulations of Ionized Sputter Metal Deposition
Hamaguchi, S. ; Rossnagel, S. M.
Pub. info.: Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.113-,  1995.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 389
5.

Technical Paper
Technical Paper
5. SPUTTERING PHENOMENA IN ION THRUSTERS Final Repot
Robinson, R. S. ; Rossnagel, S. M.
Pub. info.: NASA Technical Reports.  (NASA-CR-168172),  pp.1-32,  1983.  National Aeronautics and Space Administration